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Market Research: The Global Outlook for Chemical Mechanical Planarization Technology and Materials 2000-2005

The Global Outlook for Chemical Mechanical Planarization Technology and Materials 2000-2005


Published August 2001

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This is Kline's second edition of its examination of the rapid growing use of abrasive slurries and other consumables for CMP processes. The report focuses on current developments and the outlook for major CMP consumables such as abrasive slurries, pads, brushes, and filter media by type of media planarized. It includes quantitative information on the market position and plans of existing suppliers and new entrants to the market, as well as a detailed analysis of the impact of the evolving electronic device industry on CMP. (Y398A)

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FULL REPORT [$17,500]

INTRODUCTION [$0]

ROADMAP GOALS AFFECTING CMP [$875]

CMP TECHNOLOGY [$875]

  • Figure 4-1 CONTACT PLANARIZATION
  • Figure 4-2 LOCOS STRUCTURE
  • Figure 4-3 SHALLOW TRENCH ISOLATION
  • Figure 4-4 ETCH-BACK PROCESSING
  • Figure 4-5 SINGLE-DAMASCENE PROCESSING
  • Figure 4-6 DUAL-DAMASCENE SEQUENCES
  • Figure 4-7 EMBEDDED LOW-K DIELECTRICS
  • Figure 4-8 SELF-ALIGNING GATE CONSTRUCTION
  • Figure 4-9 REPLACEMENT GATE SEQUENCE
  • Figure 4-10 BARRIER METALS FOR USE WITH TUNGSTEN PLUGS
  • Figure 4-11 HARDNESS OF SEMICONDUCTOR DIELECTRICS

EQUIPMENT [$875]

  • Figure 5-1 BASIC CMP DEVICE
  • Figure 5-2 CMP WAFER CARRIER – DETAIL
  • Figure 5-3 LINEAR CMP POLISHERS
  • Figure 5-4 WEB CMP POLISHER
  • Figure 5-5 ELECTROPOLISHING DEVICE
  • Figure 5-6 TYPICAL FILTRATION TRAIN FOR CMP
  • Table 5-1 GLOBAL INSTALLED BASE OF CMP MACHINERY, 1998-2000

END USES [$3,500]

  • Table 6-1 PROJECTED WORLD GROWTH IN CMP OPERATIONS BY TYPE OF DEVICE MANUFACTURED, 2000 TO 2005
  • Table 6-2 PROJECTED WORLD GROWTH IN CMP OPERATIONS BY MEDIA PROCESSED, 2000 TO 2005
  • Figure 6-1 CMP PROCESSING IN ASIC MANUFACTURE, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-2 TOP ASIC SUPPLIERS, 2000
  • Figure 6-3 CMP PROCESSING IN MICROPROCESSOR MANUFACTURE, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-4 TOP SUPPLIERS OF MICROPROCESSORS, 2000
  • Figure 6-5 CMP PROCESSING MINUTES IN MAKING DSPs, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-6 TOP SUPPLIERS OF DSPs, 2000
  • Figure 6-7 CMP PROCESSING MINUTES IN MAKING MCUs, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-8 TOP SUPPLIERS OF MCUs, 2000
  • Figure 6-9 FLASH MEMORY TRANSISTOR STRUCTURE
  • Figure 6-10 CMP PROCESSING MINUTES IN MAKING FLASH MEMORY, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-11 TOP SUPPLIERS OF FLASH MEMORY, 2000
  • Figure 6-12 CMP PROCESSING MINUTES IN MAKING SRAM, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-13 TOP SUPPLIERS OF SRAM, 2000
  • Figure 6-14 CMP PROCESSING MINUTES IN MAKING DRAM, BY MEDIA PLANARIZED, 2000 TO 2005
  • Figure 6-15 TOP SUPPLIERS OF 16 -Mb and 64 -Mb DRAM, 2000
  • Figure 6-16 CMP PROCESSING MINUTES IN MAKING HARD DISKS, BY MEDIA PLANARIZED, 2000 TO 2005

CONSUMABLE PRODUCTS [$7,000]

  • Table 7-1 USAGE RATES FOR CMP CONSUMABLES
  • Table 7-2 CONSUMPTION OF CMP MATERIALS BY MEDIA PLANARIZED, 2000
  • Figure 7-1 CMP MARKET VALUE, 2000 TO 2005

    SLURRIES [$1,750]

    • Figure 7A-1 SLURRY USAGE IN CMP APPLICATIONS, 2000
    • Figure 7A-2 SUPPLIERS OF FUMED SILICA SLURRIES, 2000
    • Figure 7A-3 SUPPLIERS OF COLLOIDAL SILICAS, BY MARKET SHARE, 2000
    • Figure 7A-4 SUPPLIERS OF ALUMINA SLURRIES FOR CMP, 2000
    • Figure 7A-5 SUPPLIERS OF CERIA AND CERIA/SILICA SLURRIES FOR CMP, 2000
    • Figure 7A-6 GROWTH IN SLURRY CONSUMPTION BY MEDIA PLANARIZED, 2000 TO 2005
    • Figure 7A-7 GROWTH IN SLURRY MARKET VALUE BY SLURRY TYPE, 2000 TO 2005
    • Table 7A-1 MAJOR GRADES OF FUMED SILICA SLURRIES FOR CMP
    • Table 7A-2 CONSUMPTION OF FUMED SILICA SLURRIES IN CMP, 2000
    • Table 7A-3 INTERVIEW COMMENTS REGARDING FUMED SILICA SLURRIES
    • Table 7A-4 SUPPLIERS OF FUMED SILICA POWDER AND SLURRY
    • Table 7A-5 OUTLOOK FOR CONSUMPTION OF FUMED SILICA SLURRY IN CMP, 2000 TO 2005
    • Table 7A-6 MAJOR GRADES OF COLLOIDAL SILICA FOR CMP
    • Table 7A-7 CONSUMPTION OF COLLOIDAL SILICA SLURRIES FOR CMP, 2000
    • Table 7A-8 SUPPLIERS OF COLLOIDAL SILICA AND CMP SLURRY
    • Table 7A-9 OUTLOOK FOR CONSUMPTION OF COLLOIDAL SILICA SLURRY FOR CMP, 2000 TO 2005
    • Table 7A-10 MAJOR GRADES OF ALUMINA SLURRIES FOR CMP
    • Table 7A-11 CONSUMPTION OF ALUMINA SLURRIES FOR CMP, 2000
    • Table 7A-12 SUPPLIERS OF ALUMINA AND ALUMINA SLURRIES FOR CMP
    • Table 7A-13 OUTLOOK FOR CONSUMPTION OF ALUMINA SLURRY FOR CMP, 2000 TO 2005
    • Table 7A-14 MAJOR GRADES OF CERIA AND SILICA/CERIA BLENDS FOR CMP
    • Table 7A-15 PRODUCERS OF CERIA FOR CMP SLURRIES, 2000

    POLISHING PADS [$1,750]

    • Figure 7B-1 OVERALL CMP POLISHING PADS, 2000
    • Figure 7B-2 3M’S FIXED-ABRASIVE PAD CONFIGURATION APPLICATIONS
    • Figure 7B-3 SUPPLIERS OF POLISHING PADS FOR CMP, 2000
    • Figure 7B-4 RELATIVE GROWTH OF POLISHING PADS IN THE CMP MARKET, 2000 TO 2005
    • Table 7B-1 MAJOR GRADES OF POLISHING PADS FOR CMP
    • Table 7B-2 INTERVIEW COMMENTS REGARDING POLISHING PADS IN CMP

    PAD CONDITIONERS [$1,050]

    • Figure 7C-1 GLOBAL MARKET FOR PAD CONDITIONERS, 2000
    • Figure 7C-2 SUPPLIERS OF PAD CONDITIONERS, 2000

    BRUSHES [$1,050]

    • Figure 7D-1 OVERALL MARKET FOR CMP BRUSHES, BY MEDIA PLANARIZED, 2000
    • Figure 7D-2 SUPPLIERS OF BRUSHES FOR CMP, 2000

    FILTERS [$1,050]

    • Figure 7E-1 GLOBAL CONSUMPTION OF CMP FILTERS, 2000
    • Figure 7E-2 SUPPLIERS OF FILTERS FOR CMP, 2000

    NON-SLURRY SOLUTIONS [$1,050]

    • Figure 7F-1 OVERALL CLEANING CHEMISTRY VOLUME AND VALUE, 2000
    • Figure 7F-2 SUPPLIERS OF COMMERCIAL CLEANING SOLUTIONS, 2000

SUPPLIERS [$5,250]

    • Figure 8-1 MAJOR SUPPLIERS OF CONSUMABLES FOR CMP, 2000
    • Table 8-1 ESTIMATED SALES OF CMP CONSUMABLES BY SUPPLIER AND TYPE OF MATERIAL, 2000
    • Figure 8-2 SUPPLIER SHARES OF THE CMP SLURRY MARKET, 2000
    • Figure 8-3 SUPPLIER SHARES OF THE CMP POLISHING PADS MARKET, 2000
    • Figure 8-4 SUPPLIER SHARES OF THE CMP PAD CONDITIONER MARKET, 2000
    • Figure 8-5 SUPPLIER SHARES OF THE CMP BRUSH MARKET, 2000
    • Figure 8-6 SUPPLIER SHARES OF THE CMP FILTER MARKET, 2000
    • Figure 8-7 SUPPLIER SHARES OF THE CMP SOLUTIONS MARKET, 2000
    • Figure 8-8 RODEL’S ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Table 8-2 ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY RODEL, 2000
    • Figure 8-9 CABOT’S ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Table 8-3 ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY CABOT, 2000
    • Figure 8-10 EKC’S ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Table 8-4 ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY EKC, 2000
    • Figure 8-11 FUJIMI’S ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Table 8-5 ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY FUJIMI, 2000
    • Figure 8-12 3M’S ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Figure 8-13 UNIVERSAL PHOTONICS’ ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY TYPE OF PRODUCT, 2000
    • Table 8-6 ESTIMATED GLOBAL SALES OF CMP CONSUMABLES BY UNIVERSAL PHOTONICS, 2000

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